Use of a sensor to control the fan filter unit of a standard mec

Details Use of a sensor to control the fan filter unit of a standard mec Use of a sensor to control the fan filter unit of a standard mec

1996-12-02

2000-01-04

Joyce, Harold

Ventilation

Clean room

454195, 414935, H05K 500

Patent

active

06010399&

ABSTRACT:
A Standard Mechanical Inter Face is described where a sensor causes a fan in a fan filter unit, attached to a Standard Mechanical Inter Face, to be turned on or off depending on the position of the door in semiconductor wafer equipment. An apparatus for realizing this and a method for its use are given. Two examples of sensors for realizing this invention are described. A preferred embodiment of the invention is the use of an infrared sensor placed within the Standard Mechanical Inter Face and containing an infrared transmitter and infrared receiver in one housing.

REFERENCES:
patent: 4705951 (1987-11-01), Layman et al.
patent: 4812810 (1989-03-01), Query et al.
patent: 4851018 (1989-07-01), Lazzari et al.
patent: 4967083 (1990-10-01), Kornbrekke et al.
patent: 5329949 (1994-07-01), Moncourtois et al.
patent: 5390785 (1995-02-01), Garric et al.

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