Updating process controller based upon fault detection analysis

Details Updating process controller based upon fault detection analysis Updating process controller based upon fault detection analysis

2005-03-22

2005-03-22

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S108000, C700S121000

Reexamination Certificate

active

06871114

ABSTRACT:
A method and an apparatus for adjusting a process controller based upon a fault detection analysis. A process step upon a workpiece is performed using a processing tool. Manufacturing data relating to processing of the workpiece is acquired. The manufacturing data may include metrology data relating to the processed workpiece and/or tool state data relating to the tool state of a processing tool. A metrology/tool state data integration process is performed based upon the acquired manufacturing data. The metrology/tool state data integration process includes performing an assessment of a tool health related to the processing tool and adjusting an emphasis of the metrology data based upon the assessment of the tool health.

REFERENCES:
patent: 5801965 (1998-09-01), Takagi et al.
patent: 5991699 (1999-11-01), Kulkarni et al.
patent: 6192287 (2001-02-01), Solomon et al.
patent: 6442445 (2002-08-01), Bunkofske et al.

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