Universal, microfabricated probe for scanning probe microscopes

Details Universal, microfabricated probe for scanning probe microscopes Universal, microfabricated probe for scanning probe microscopes

1991-05-13

1992-11-24

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

250307, H01J 3726

Patent

active

051665204

ABSTRACT:
A universal probe which can be used with many different types of scanning probe microscopes is disclosed. The probe is mounted on a flexible base. The flexible base may either be a flexible cantilevered beam or a flexible membrane. The probe is a sharply tapered probe and forms in general a squat hollow pyramid or cone. The apex of the pyramid or cone has an aperture defined therethrough with a small controlled diameter of the order of 10 to 50,000 Angstroms. The hollow within the probe is filled with a material chosen according to the type of the scanning probe microscope used and the underlying surface. A signal is coupled to the material in the tip of the probe from the scanning probe microscope to interact with the underlying surface.

REFERENCES:
patent: 4747698 (1988-05-01), Wickramasinghe et al.
patent: 4998016 (1991-03-01), Nose et al.

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