Unit cell layout and transfer gate design for high density DRAMs

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257302, 257303, 257304, 257305, 257346, 257377, H01L 2170

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active

059362715

ABSTRACT:
A DRAM unit cell is disclosed which comprises a trench capacitor having a signal electrode, a bit line, a planar active word line overlapping the trench capacitor and a planar FET having a main conducting path coupled between the signal electrode of the trench capacitor and the bit line and a gate electrode formed by the active word line.

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