Plastic article or earthenware shaping or treating: apparatus – Preform reshaping or resizing means: or vulcanizing means... – Surface deformation means only
Reexamination Certificate
2006-02-07
2006-02-07
Smith, Duane (Department: 1722)
Plastic article or earthenware shaping or treating: apparatus
Preform reshaping or resizing means: or vulcanizing means...
Surface deformation means only
C425S389000, C425S405100, C425S408000, C425SDIG019
Reexamination Certificate
active
06994541
ABSTRACT:
A uniform pressing apparatus used in nanoimprint lithographic process is proposed, including a housing having a first flange; a first carrier unit for carrying an imprint mold and having at least one second flange freely attaches to the first flange; a second carrier unit for carrying a substrate; at least one uniform pressing unit mounted on a imprint force transmission path; and a power source driving at least one of the housing and the second carrier unit to allow a contact to be formed between the mold and the moldable layer. Therefore, the nanoimprint lithographic process is achieved with good parallelism between the substrate and the mold and with uniform pressure distribution.
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patent: 6062133 (2000-05-01), Blalock
patent: 6482742 (2002-11-01), Chou
patent: WO 01/42858 (2001-06-01), None
Chen Chuan-Feng
Chen Ming-Chi
Chung Yong-Chen
Feng Wen-Hung
Hsu Chia-Chun
Industrial Technology Research Institute
Nguyen Thu Khanh T.
Rabin & Berdo P.C.
Smith Duane
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