Underfill system for semiconductor package

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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C029S740000, C029S743000, C029S832000, C029S834000, C438S126000

Reexamination Certificate

active

06895666

ABSTRACT:
An underfill system for filling gaps between semiconductor chips and substrates is provided. The underfill system comprises a blower for blowing air, an air duct coupled to the blower, the air duct comprising a main duct coupled to the blower and a plurality of sub-ducts each having an outlet being connected to the main duct and an inlet to be located along one side of the semiconductor chip. A filling material from a dispenser fills the gaps by suction due to the pressure difference between the main duct and the sub-duct. Thus, the present invention shortens the filling time of the underfill process and prevents voids or air bubbles of the filling material from forming within the gap.

REFERENCES:
patent: 5866442 (1999-02-01), Brand
patent: 6048656 (2000-04-01), Akram et al.
patent: 6253834 (2001-07-01), Sterner
patent: 6534345 (2003-03-01), Muff et al.

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