Ultraviolet light emitting device and application thereof

Details Ultraviolet light emitting device and application thereof Ultraviolet light emitting device and application thereof

1988-09-01

1990-03-20

Griffin, Robert L.

Coating processes

Electrical product produced

Welding electrode

313577, 31511121, B05D 306

Patent

active

049100440

ABSTRACT:
Ultraviolet light is emitted mainly with 185 nm in wave length so that a thick silicon layer is fabricated by decomposition of silane gas at a high deposition speed. As a light source, a bulb is filled with an amount of mercury gas without dosing argon gas which enhances preferentially light with 254 nm in wave length.

REFERENCES:
patent: 1917848 (1933-07-01), Marden et al.
patent: 4435445 (1984-03-01), Allred et al.
patent: 4558660 (1985-12-01), Nishizawa et al.
patent: 4585671 (1986-04-01), Kitagawa et al.
patent: 4735821 (1988-04-01), Yamazaki et al.

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