Ultrasonic transducer, ultrasonic transducer fabrication...

Details Ultrasonic transducer, ultrasonic transducer fabrication... Ultrasonic transducer, ultrasonic transducer fabrication...

2011-05-31

2011-05-31

Budd, Mark (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C310S334000

Reexamination Certificate

active

07952256

ABSTRACT:
An ultrasonic transducer according to the present invention includes: two or more ultrasonic transducer cells, each of which has a lower electrode, a first insulating layer placed on the lower electrode, a cavity placed on the first insulating layer, a second insulating layer placed on the cavity, and an upper electrode placed above the second insulating layer; channels which communicate the cavities with each other; the second insulating layer placed on the channels; holes formed in the second insulating layer placed on the channels; and sealing portions which seal the holes, where that part of the sealing portions which enters the channels is the same in cross-sectional shape as the holes.

REFERENCES:
patent: 5982709 (1999-11-01), Ladabaum et al.
patent: 7257051 (2007-08-01), Thomenius et al.
patent: 7280435 (2007-10-01), Thomenius et al.
patent: 7408283 (2008-08-01), Smith et al.
patent: 7489593 (2009-02-01), Nguyen-Dinh et al.
patent: 7770279 (2010-08-01), Nguyen-Dinh et al.

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