Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Patent
1997-08-29
1999-06-15
Coe, Philip R.
Cleaning and liquid contact with solids
Apparatus
With movable means to cause fluid motion
134 13, 310317, B08B 312
Patent
active
059112328
ABSTRACT:
Disclosed is an ultrasonic cleaning device including a cleaning tank containing a semiconductor wafer W and pure water, and a plurality of vibrating plates provided with the cleaning tank. The vibrating plates are electric distortion transducers. By controlling the output phases of oscillators that vibrate the plates with a single oscillating source, the output phases of the oscillation sources can be matched. This enables uniform sound pressure distribution. Consequently, ultrasonic interference between vibrating plates can be eliminated. Uniform sound pressure distribution makes it possible to obtain a uniform particle removal rate, thereby improving cleaning efficiency.
REFERENCES:
patent: 2891176 (1959-06-01), Branson
Kitahara Shigenori
Mokuo Shori
Taguchi Keiji
Coe Philip R.
Tokyo Electron Ltd.
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