Ultrafine silicon tips for AFM/STM profilometry

Details Ultrafine silicon tips for AFM/STM profilometry Ultrafine silicon tips for AFM/STM profilometry

1994-03-10

1995-01-17

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

73105, G01B 734

Patent

active

053827953

ABSTRACT:
An ultrafine tip for AFM and STM profilometry of trenches having sidewalls. The tip includes a lateral circumferential edge protrusion to allow profilometry of the sidewalls of a trench located in a semiconductor or insulator substrate.

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"Microprobe--Based CD Measurement Tool", IBM Technical Disclosure Bulletin, vol. 32, No. 7, Dec. 1989, p. 168.

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