Ultra-thin sample preparation for transmission electron...

Details Ultra-thin sample preparation for transmission electron... Ultra-thin sample preparation for transmission electron...

2007-03-27

2007-03-27

Berman, Jack (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S307000, C250S304000, C250S311000, C438S014000, C438S022000, C216S002000

Reexamination Certificate

active

11094443

ABSTRACT:
In accordance with the invention, there is a method of fabricating a material for transmission electron microscopy comprising removing a first portion from a material having a thickness of (d1) to form a thinned material having a thickness of (d2), contacting the thinned material to a sacrificial layer having a thickness of (s1), and removing a second portion from the thinned material so the thinned material has a thickness of (d3), wherein (d3)<(d2).

REFERENCES:
patent: 6194720 (2001-02-01), Li et al.
patent: 6576900 (2003-06-01), Kelly et al.
patent: 2006/0065830 (2006-03-01), Bauer et al.

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