Ultra-precision two-dimensional moving apparatus

Details Ultra-precision two-dimensional moving apparatus Ultra-precision two-dimensional moving apparatus

1983-10-18

1986-03-18

Haroian, Harry N.

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33568, G01B 525

Patent

active

045759421

ABSTRACT:
An ultra-precision two-dimensional moving apparatus is disclosed, in which a fine-moving table is two-dimensionally movably held on a coarse-moving carriage. This fine-moving table is driven finely in X, Y and .theta. directions by three piezoelectric element actuators. The fine-table position is measured by a laser interferometric measurement system. In response to the error signal between the measured position and a desired position, the piezoelectric element actuators are driven by closed loop control.

REFERENCES:
patent: 3617126 (1971-11-01), Gillespie
patent: 3744902 (1973-07-01), Henker
patent: 4118869 (1978-10-01), Hartung et al.

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