Ultra-high vacuum apparatus

Details Ultra-high vacuum apparatus Ultra-high vacuum apparatus

1999-06-24

2000-02-29

Fox, John

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

251368, G01N 2300

Patent

active

060312351

ABSTRACT:
A vacuum container is evacuated to be kept at an ultra-high vacuum. Valve means is provided for connecting and disconnecting the inside of the vacuum container with and from the outside thereof, and includes a vacuum-tight seal made of a high polymer having a water absorptivity of 0.1% and less and an outgassing rate of 2.times.10.sup.-6 (Torr.multidot.l/sec/cm.sup.2 :at 200.degree. C.) and less.

REFERENCES:
patent: 4889319 (1989-12-01), Phillips et al.
patent: 5124397 (1992-06-01), Kanazawa et al.
patent: 5170990 (1992-12-01), Kamiya
Polymer Handbook, Third Edition, p. V-42, Brandrup et al.; John Wiley & Sons, N.Y.

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