Ultra high precision measurement tool with control loop

Details Ultra high precision measurement tool with control loop Ultra high precision measurement tool with control loop

2008-06-04

2010-12-14

Wells, Nikita (Department: 2881)

Radiant energy

Ion generation

Field ionization type

C250S42300F, C250S424000, C250S426000, C250S492200, C250S3960ML

Reexamination Certificate

active

07851768

ABSTRACT:
A focused ion beam device is described comprising a gas field ion source with an emitter emitting an ion beam including ions of gas, an ion beam column and a beam current control loop comprising a beam current measurement device. Furthermore, the focused ion beam device may have a sample charge control comprising measuring the sample charge. A method of operating a focused ion beam device is provided comprising applying a voltage between an emitter an electrode, applying gas to the emitter, emitting ions of a gas from the emitter and controlling a beam current by measuring the beam current with a beam current measurement device.

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patent: 62163246 (1987-07-01), None
Extended European Search Report for EP 08156663.0 dated Oct. 17, 2008.
Hong-Shi Kuo, et al., Noble Metal/W(111) Single-Atom Tips and Their Field Electron and Ion Emission Characteristics, Japanese Journal of Applied Physics, vol. 45 No. 11, 2006, pp. 8972-8983.

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