Ultra-fast photometric instrument

Details Ultra-fast photometric instrument Ultra-fast photometric instrument

1984-01-25

1986-04-29

Punter, William H.

Optics: measuring and testing

By polarized light examination

Of surface reflection

G01N 2121

Patent

active

045853487

ABSTRACT:
This is a static photometric polarimeter for use with a sample S upon which a beam passed through a beam splitter (which reflects the beam to a detector D.sub.o) and which beam is 45.degree. polarized. The reflection of the beam from the surface of sample S is passed to a polarizing beam splitter with one portion of the reflected beam going to a detector D.sub.s which measures the perpendicular polarization component of the beam and the other portion of the beam going to the detector D.sub.p which measures the parallel polarized portion of the reflected beam.

REFERENCES:
patent: 3060793 (1962-10-01), Wells
patent: 3653767 (1972-04-01), Liskowitz
patent: 3904293 (1975-09-01), Gee
patent: 3995957 (1976-12-01), Pilloff
Chwalow et al., "Automatic Brewster's Angle Thin Film Thickness Measurement Spectrophotometer", IBM Tech. Disc. Bull., 1-1978, pp. 3133-3134.
Smith, N., "Optical Constants of Sodium & Potassium From 0.5 to 4.0 eV by Split-Beam Ellipsometry", Phys. Review, 7-1969, pp. 634-644.
Smith, T., "An Automated Scanning Ellipsometer", Surface Science, 6-1976, pp. 212-220.
Hunderi et al., "A Simple Automatic Ellipsometer for A Wide Energy Range", Surface Science, 6-1976, pp. 182-188.

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