Ultra-broadband UV microscope imaging system with wide range zoo

Details Ultra-broadband UV microscope imaging system with wide range zoo Ultra-broadband UV microscope imaging system with wide range zoo

1997-08-07

1999-12-07

Henry, Jon

Optical: systems and elements

Having significant infrared or ultraviolet property

Having folded optical path

359354, 359357, 359365, 359432, G02B 2306, G02B 1708, G02B 1304, G02B 1514

Patent

active

059993103

ABSTRACT:
An ultra-broadband ultraviolet (UV) catadioptric imaging microscope system with wide-range zoom capability. The microscope system, which comprises a catadioptric lens group and a zooming tube lens group, has high optical resolution in the deep UV wavelengths, continuously adjustable magnification, and a high numerical aperture. The system integrates microscope modules such as objectives, tube lenses and zoom optics to reduce the number of components, and to simplify the system manufacturing process. The preferred embodiment offers excellent image quality across a very broad deep ultraviolet spectral range, combined with an all-refractive zooming tube lens. The zooming tube lens is modified to compensate for higher-order chromatic aberrations that would normally limit performance.

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Abe Offner, "Field Lenses and Secondary Axial Aberration," Applied Optics, vol. 8, No. 8, Aug. 1969, pp. 1735-1736.

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