4. Optics: measuring and testing
  5. Inspection of flaws or impurities
  6. Having predetermined light transmission regions

Bin-Ming Benjamin Tsai

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Confocal wafer depth scanning inspection method

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate

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Confocal wafer inspection method and apparatus using fly...

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate

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Confocal wafer inspection method and apparatus using fly...

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Confocal wafer inspection method and apparatus using fly...

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Continuous movement scans of test structures on...

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
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