Material or article handling – Apparatus for charging a load holding or supporting element... – With simultaneous charging and discharging of plural load...
Patent
1997-06-23
1999-05-04
Kramer, Dean
Material or article handling
Apparatus for charging a load holding or supporting element...
With simultaneous charging and discharging of plural load...
414939, B65G 4907
Patent
active
058996532
ABSTRACT:
An apparatus for lifting an object in a sealed chamber and transferring an object from a robot to an operating member has a pair of concentrically mounted support members. A lower support member positioned within the chamber extends through an opening in the chamber is adapted to lift a wafer from a robot. A motion actuator positioned outside the chamber and attached to the lower support member is adapted to move the lower support member axially. An upper support member positioned within the chamber above the lower support member extends through an axial passageway in the lower support member to a position external the chamber and below the lower support member. A separate motion actuator positioned outside the chamber and attached to the upper support member is adapted to move the upper support member axially. A flexible vacuum bellows positioned in the chamber and between the upper support member, the lower support member, and the chamber provides a seal therebetween.
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patent: 5234303 (1993-08-01), Koyano
patent: 5266119 (1993-11-01), Taniguchi et al.
patent: 5443648 (1995-08-01), Ohkase
patent: 5445491 (1995-08-01), Nakagawa et al.
patent: 5516367 (1996-05-01), Lei et al.
patent: 5569350 (1996-10-01), Osada et al.
patent: 5695568 (1997-12-01), Sinha et al.
Applied Materials Inc.
Kramer Dean
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