Two-stage cryopump

Details Two-stage cryopump Two-stage cryopump

1991-03-04

1992-05-12

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 62268, 417901, B01D 800

Patent

active

051116677

ABSTRACT:
A two-stage cryopump having a refrigerator including a first stage and a second stage being colder than the first stage; a condensation member having a condensation surface; a first coupler for connecting the condensation member to the second stage in a thermally conducting manner; an adsorption member having an adsorption surface and being spaced from the condensation member; and a second coupler for connecting the adsorption member to the second stage in a heat conducting manner. There is further provided a heater for heating the adsorption member during time periods for regenerating the adsorption member. The second coupler is so designed that it thermally sufficiently insulates the adsorption member from the second stage and from the condensation member at least during heating periods of the adsorption member, for preventing heating the condensation member by the heater.

REFERENCES:
patent: 2465229 (1949-03-01), Hipple, Jr.
patent: 2985356 (1961-05-01), Beecher
patent: 3024009 (1962-03-01), Booth, Jr. et al.
patent: 4438632 (1984-03-01), Lessard et al.
patent: 4454722 (1984-06-01), Bartlett et al.
patent: 4910965 (1990-03-01), Lepofsky et al.
patent: 4918930 (1990-04-01), Gaudet et al.

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