4. Refrigeration
  5. Low pressure cold trap process and apparatus

Uwe Timm

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Apparatus for applying semiconductor chip to substrates...

Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate

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Cryogenic pump with an essentially cup-shaped housing

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump and process for regenerating said cryopump

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Two-stage cryopump

Refrigeration – Low pressure cold trap process and apparatus
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Profile ID: LFUS-PAI-P-1886462

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