Two-sided solid-state imaging device

Details Two-sided solid-state imaging device Two-sided solid-state imaging device

1991-03-18

1992-07-28

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controlled circuit

250211R, H01J 4014

Patent

active

051342740

ABSTRACT:
A charge-coupled imaging device (FIG. 3) is thinned to allow for backside illumination. The device is further enhanced using ion implantation techniques to establish an electrical field (44) at the back surface, which functions to drive free electrons to potential wells generated beneath a gate structure (40) on the front surface. The device structure allows for both front side and backside illumination and is useful as an imaging device in applications where it is necessary to combine images from two different optical sources. The imaging device is particularly useful in terrestrial guidance systems (FIG. 5) where the imaging device is used to detect guide stars from a large guide star field. In such systems, the imaging device must be translated within an X-Y plane in order to cover the entire guide star field. In order to accurately know the position of the imaging device, optical fiducial marks are imaged onto a side of the imaging device opposite the side receiving the guide star photons. Using the two-sided imaging device allows for the elimination of optical elements necessary for combining the optical signals, particular the use of beam splitters.

REFERENCES:
patent: 4908718 (1990-03-01), Shimada
patent: 4931661 (1990-06-01), Fukaya et al.

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