Two position robot design for FOUP purge

Details Two position robot design for FOUP purge Two position robot design for FOUP purge

2005-08-02

2005-08-02

Snider, Theresa T. (Department: 1744)

Brushing, scrubbing, and general cleaning

Machines

With air blast or suction

C015S316100, C015S312100

Reexamination Certificate

active

06922867

ABSTRACT:
This invention is an apparatus for purging unwanted gasses from the Front Opening Unified Pod (FOUP). It consists of a purging wand which is inserted into the chamber for an optimal purge. The purging wand moves back and forth along a simple axis activated by a linkage robot. The wand is carried along a track with the FOUP and when its reaches its optimal position inside the FOUP, the source of cleaning gas is allowed to flow into and spray out of the wand thereby purging the FOUP. After the purging is completed, the linkage robot withdraws the wand from within the FOUP to its original position.

REFERENCES:
patent: 3304570 (1967-02-01), Seress et al.
patent: 4655258 (1987-04-01), Breyer et al.
patent: 4864679 (1989-09-01), Briner
patent: 4869296 (1989-09-01), Shaw
patent: 5594973 (1997-01-01), Brusseleers et al.
patent: 2004/0152322 (2004-08-01), Tokunaga
patent: 2004/0168742 (2004-09-01), Kim et al.
patent: 2004/0182472 (2004-09-01), Aggarwal
patent: 2004/0250519 (2004-12-01), Wu et al.

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