Two-piece slit valve door with molded-in-place seal for a vacuum

Details Two-piece slit valve door with molded-in-place seal for a vacuum Two-piece slit valve door with molded-in-place seal for a vacuum

1997-07-11

2000-07-18

Hepperle, Stephen M.

Valves and valve actuation

Valve

Removable seat engaging element

251356, F16K 132

Patent

active

060895438

ABSTRACT:
A vacuum processing system may have a two-piece slit valve door, including a seal plate mounted on a mounting member, for closing the slit valve in a vacuum chamber. The seal plate, the piece that actually contacts the slit valve, may have a molded-in-place seal for making the contact and preventing metal-to-metal contact between the door and the valve. The seal may have a parabolic profile and be adhesively bonded within a groove in order to enhance its compressive and sealing capabilities. The seal plate may be removable for ease of service or replacement. Any particles generated by metal-to-metal contact between the seal plate and its mounting member may be captured by an O-ring statically sealed around the periphery between the two pieces.

REFERENCES:
patent: 3558097 (1971-01-01), DeFrees
patent: 3764104 (1973-10-01), Kempton
patent: 4154426 (1979-05-01), Santy et al.
patent: 4474358 (1984-10-01), Bennett
patent: 4682759 (1987-07-01), Hall et al.
patent: 4785962 (1988-11-01), Toshima
patent: 4915355 (1990-04-01), Fort
patent: 5226632 (1993-07-01), Tepman et al.
patent: 5273071 (1993-12-01), Oberrecht
patent: 5275303 (1994-01-01), Szalai
patent: 5363872 (1994-11-01), Lorimer
patent: 5579718 (1996-12-01), Freerks
Parker Seals, "Gask-O-Seal Handbook," Parker Hannifin Corporation, 1991.
Parker Gask-O-Seals, page 3.

Affiliated with

Also associated with

Rating

Two-piece slit valve door with molded-in-place seal for a vacuum does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Two-piece slit valve door with molded-in-place seal for a vacuum, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Two-piece slit valve door with molded-in-place seal for a vacuum will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2028030