Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means
Patent
1993-03-02
1994-10-11
Ip, Paul
Electricity: motive power systems
Positional servo systems
With particular 'error-detecting' means
3185681, 31856816, 414222, 901 20, G21K 510
Patent
active
053550668
ABSTRACT:
A robot having a pair of magnetic couplings that each couple a motor in a cylindrical first chamber to an associated cylindrical ring closely spaced from the cylindrical wall of said first chamber. The robot includes a mechanism to convert rotation of each of these rings into separate motions of the robot. In the preferred embodiment, these separate motions are radial and rotational.
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Applied Materials Inc.
Heal Noel F.
Ip Paul
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