Adhesive bonding and miscellaneous chemical manufacture – Differential etching apparatus including focus ring...
Reexamination Certificate
2005-08-30
2005-08-30
Hassanzadeh, P. (Department: 1763)
Adhesive bonding and miscellaneous chemical manufacture
Differential etching apparatus including focus ring...
C156S345530, C156S345510, C118S715000, C118S7230AN, C118S500000, C204S192100, C204S298160, C216S067000, C438S710000, C315S111710, C427S534000, C427S569000
Reexamination Certificate
active
06936135
ABSTRACT:
A confinement ring coupling arrangement for coupling, in a plasma processing chamber, a confinement ring to a plunger. The plunger is configured to move the confinement ring to deploy and stow the confinement ring to facilitate processing of a substrate within the plasma processing chamber. The confinement ring coupling arrangement includes a hanger adapter having a locking head, the hanger adapter being configured to be coupled with the plunger. The confinement ring coupling arrangement further includes a hanging bore disposed in the confinement ring and configured to receive the locking head and to secure the locking head within the hanging bore during stowing and deployment of the confinement ring, wherein a diameter of the locking head is sufficiently smaller than a cross-section dimension of the hanging bore to prevent a sidewall of the locking head from scraping against a sidewall of the hanging bore during the stowing and deployment of the confinement ring.
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Hassanzadeh P.
IP Strategy Group, P.C.
Kackar Ram N
Lam Research Corporation
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