Measuring and testing – Testing of apparatus
Patent
1996-08-26
1999-10-26
Brock, Michael
Measuring and testing
Testing of apparatus
738658, 33533, 33645, G01M 1900, G01B 516, G01D 2100
Patent
active
059708077
ABSTRACT:
A method and apparatus to gage the spacing between a plurality of handling elements used for transferring planar objects into and out of holding receptacles in a semiconductor process. The handling tweezers are moved to a checking location and fit interleaved with the gage apparatus. If the handling tweezers do not fit, the tweezers are moved to an accessible maintenance location for alignment and recalibration enabling its use for transferring semiconductor wafers to and from wafer holding receptacles in a chemical vapor deposition vertical diffusion furnace.
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Chen Wan-Lai
Chen Yi-Hsin
Hsu Hwa-Ching
Ackerman Stephen B.
Brock Michael
Saile George O.
Soliz Chad
Taiwan Semiconductor Manufacturing Company , Ltd.
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