Tweezer-equipped scanning probe microscope and transfer method

Details Tweezer-equipped scanning probe microscope and transfer method Tweezer-equipped scanning probe microscope and transfer method

2011-08-02

2011-08-02

Raevis, Robert R (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

Reexamination Certificate

active

07987703

ABSTRACT:
A tweezer-equipped scanning probe microscope comprises a first arm with a probing portion, a second arm that moves along an opening direction or a closing direction relative to the first arm, an electrostatic actuator that drives the second arm along the opening direction or the closing direction based upon an opening/closing drive voltage applied thereto, an amplifier that induces self-oscillation in the electrostatic actuator by using an electrically equivalent circuit accompanying the electrostatic actuator as a feedback circuit and causes the second arm to vibrate through the self-oscillation, and a vibration state detection unit that detects a change of vibration state of the second arm as the second arm contacts an object.

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Katsuyori Suzuki et al., “The Displacement Measurement Device using a Comb-Drive Actuator”, EEJ Trans. SM, vol. 127, No. 3, 2007, pp. 148-152.

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