Turbomolecular pump with valves and integrated electronic contro

Details Turbomolecular pump with valves and integrated electronic contro Turbomolecular pump with valves and integrated electronic contro

1993-07-16

1995-08-22

Bertsch, Richard A.

Pumps

Condition responsive control of pump drive motor

With condition responsive control of pump fluid valve

417 42, 417 442, 417290, 417326, 4174234, 415 90, 415118, 415177, 415178, F04B 4900

Patent

active

054433681

ABSTRACT:
A vacuum system comprises, as an integral assembly, a turbomolecular pump with drive motor, a vent valve, a purge valve, a roughing valve, a heater and an electronic control module. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. Proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.

REFERENCES:
patent: 3217653 (1965-11-01), Griswold
patent: 3536418 (1970-10-01), Breaux
patent: 3829244 (1974-08-01), Miller
patent: 4918930 (1990-04-01), Gaudet et al.
patent: 4926648 (1990-05-01), Okumura et al.
patent: 5062771 (1991-11-01), Satou et al.
Brochure, "ATP 1500M, Magnetically Levitated Turbomolecular Pump,", Alcatel CIT Industries Division, Apr. 1992, pp. 1-4.
O'Hanlon, John F., A User's Guide to Vacuum Technology, Second Edition, Chapter 11, "Turbomolecular Pumps," pp. 181-195, 1989.
O'Hanlon, John F., A User's Guide to Vacuum Technology, Second Edition, Section 19.2, "Turbomolecular-Pumped Systems," pp. 361-368, 1989.
O'Hanlon, John F., A User's Guide to Vacuum Technology, Second Edition, Section 20.2.2, "Turbomolecular Pumps," pp. 393-394, 1989.

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