4. Refrigeration
  5. Low pressure cold trap process and apparatus

Robert J. Lepofsky

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Cryopump system with modular electronics

Refrigeration – Low pressure cold trap process and apparatus
Reexamination Certificate

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Cryopump system with modular electronics

Refrigeration – Low pressure cold trap process and apparatus
Reexamination Certificate

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Electronically controlled cryopump

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Electronically controlled cryopump

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Electronically controlled vacuum pump

Pumps – Condition responsive control of pump drive motor – With condition responsive control of pump fluid valve
Reexamination Certificate

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Profile ID: LFUS-PAI-P-69592

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