Turbo-pumped scanning electron microscope

Details Turbo-pumped scanning electron microscope Turbo-pumped scanning electron microscope

1993-04-26

1994-12-27

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

H01J 3716

Patent

active

053767993

ABSTRACT:
A scanning electron microscope with an effective vacuum evacuation system and vacuum pump mounting system is disclosed. A manifold having a sufficiently large gas conductance is connected to a gun assembly and to a specimen chamber. A vacuum pump is connected to the manifold for evacuating the gun assembly, specimen chamber and a beam tube. The vacuum pump mounting includes a cylindrical sleeve extending between the vacuum pump and the scanning electron microscope housing with a pair of radial O-rings sealing between the cylindrical sleeve, housing and vacuum pump.

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patent: 5254856 (1993-10-01), Matsui et al.

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