Turbo-Molecular pump with metal matrix composite rotor and stato

Details Turbo-Molecular pump with metal matrix composite rotor and stato Turbo-Molecular pump with metal matrix composite rotor and stato

1998-05-06

2000-08-01

Bueker, Richard

Fluid reaction surfaces (i.e., impellers)

Specific blade structure

Having wear liner, sheathing or insert

B63H 126

Patent

active

060957549

ABSTRACT:
The invention provides a vacuum processing system comprising a vacuum processing chamber and a turbo-molecular pump having a rotor and/or stator comprised of metal matrix composites. Another aspect of the invention provides a turbo-molecular pump having a rotor and/or a stator comprised of metal matrix composites. Because metal matrix composites are able to withstand higher operating temperatures than the aluminum alloys currently used in rotors and stators, the rotor vanes and the stator vanes that are made of metal matrix composites can provide a higher exhaust capacity with faster rotor rotations.

REFERENCES:
patent: 4681519 (1987-07-01), Sakamaki et al.
patent: 4913619 (1990-04-01), Haentjens et al.
patent: 5106273 (1992-04-01), Lemarquand et al.
patent: 5350275 (1994-09-01), Ishimaru
patent: 5439750 (1995-08-01), Ravenhall et al.
patent: 5490764 (1996-02-01), Shilling
patent: 5516380 (1996-05-01), Darolia et al.
patent: 5524699 (1996-06-01), Cook
patent: 5529748 (1996-06-01), Moreton et al.
patent: 5573607 (1996-11-01), Weaver
patent: 5728638 (1998-03-01), Strange et al.
patent: 5782609 (1998-07-01), Ikemoto et al.
"Vacuum Pump Designs Adjust to Harsher Conditions," Semiconductor International, Oct. 1997 pp. 87-90.

Affiliated with

Also associated with

Rating

Turbo-Molecular pump with metal matrix composite rotor and stato does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Turbo-Molecular pump with metal matrix composite rotor and stato, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Turbo-Molecular pump with metal matrix composite rotor and stato will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-657619