Tunnel unit and scanning head for scanning tunneling microscope

Details Tunnel unit and scanning head for scanning tunneling microscope Tunnel unit and scanning head for scanning tunneling microscope

1989-06-14

1990-08-07

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

2504421, H01J 3726

Patent

active

049470426

ABSTRACT:
A tunnel unit for a scanning tunneling microscope includes a specimen stage having a plurality of pole pieces joined together via a joint member formed of a non-magnetic material and a specimen placing surface where the pole pieces and the joint member are exposed, a permanent magnet rotatably inserted within the specimen stage and at the joint of the plurality of pole pieces, a scanning head main body, which is provided with a piezoelectric element fixed thereto and a probe mounted on the piezoelectric element, being disposed above the specimen placing surface of the specimen stage and extending across the exposed joint member, and three screws formed of a magnetic material and rotatably mounted on the scanning head main body, the screws having their end portions in contact with the specimen placing surface of the specimen stage for supporting the scanning head main body above the specimen placing surface.

REFERENCES:
patent: 4837445 (1989-06-01), Nishioka et al.
O. Marti et al., "Atomic Resolution Atomic Force Microscopy of Graphite and the Native Oxide on Silicon", Mar./Apr. 1988, pp. 287-290.
J. Schneir et al., "Tunneling Microscopy, Lithography, and Surface Diffusion on an Easily Prepared, Atomically Flat Gold Surface", Feb. 1988 pp. 718-721.

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