Tunnel current probe moving mechanism having parallel cantilever

Details Tunnel current probe moving mechanism having parallel cantilever Tunnel current probe moving mechanism having parallel cantilever

1990-07-11

1991-12-24

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

2504421, H01J 3704, G21K 510

Patent

active

050755480

ABSTRACT:
A tunnel current probe moving mechanism includes first and second substrates and at least two parallel cantilevers. The first substrate has a tunnel current probe group arranged on its surface. The tunnel current probe group includes probes which are two-dimensionally arranged at a predetermined pitch and have distal ends aligned within the same plane. The second substrate is arranged to oppose the tunnel current probe group on the first substrate, and can approach at a position where a tunnel current flows between the tunnel current probe group and the second substrate. These two cantilevers have the same length and are arranged parallel to each other on at least one of the first and second substrates. Each cantilever includes a plurality of piezoelectric driving members. When the piezoelectric driving elements are driven in response to a predetermined driving signal, the probe group is translated along the second substrate while a predetermined distance is kept between the probe group and the second substrate.

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