Radiant energy – Inspection of solids or liquids by charged particles
Patent
1987-11-24
1989-04-18
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
250307, 250311, H01J 3726
Patent
active
048230049
ABSTRACT:
Methods and apparatus for interacting carriers with a structure of matter employ an electrode for emitting said carriers at a distance from a surface of that structure, and cause such carriers to travel along ballistic trajectories inside that structure by providing along the mentioned distance a gap for performance of a process selected from the group of carrier tunneling and field emission and injecting carriers emitted by the mentioned electrode and that process ballistically into the structure through the gap and the mentioned surface. The carriers are collected or analyzed after their travel along ballistic trajectories in the structure of matter. Pertinent information on the inside of the structure is obtained by conducting inside that structure what conventionally would have been considered external ballistics, while performing the carrier-propelling internal ballistics conversely outside that structure.
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Bell L. Douglas
Kaiser William J.
Anderson Bruce C.
Berman Jack I.
California Institute of Technology
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