Tuning fork gyroscopes, accelerometers, and other sensors...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

Reexamination Certificate

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C073S514320

Reexamination Certificate

active

11153664

ABSTRACT:
A tuning fork gyroscope design where at least one proof mass is supported above a substrate. At least one drive electrode is also supported above the substrate adjacent the proof mass. Typically, the proof mass and the drive electrode include interleaved electrode fingers. A sense plate or shield electrode on the substrate beneath the proof mass extends completely under the extent of the electrode fingers of proof mass.

REFERENCES:
patent: 5481914 (1996-01-01), Ward
patent: 5492596 (1996-02-01), Cho
patent: 5747961 (1998-05-01), Ward et al.
patent: 5892153 (1999-04-01), Weinberg et al.
patent: 2003/0066351 (2003-04-01), Weinberg et al.

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