Tunable-trimmable micro electro mechanical system (MEMS) capacit

Details Tunable-trimmable micro electro mechanical system (MEMS) capacit Tunable-trimmable micro electro mechanical system (MEMS) capacit

1998-01-08

1999-09-28

Gensler, Paul

Tuners

Tuner unit directly responsive to voltage and/or current...

Reactance tuning

333197, 334 81, 361281, H03J 320

Patent

active

059595167

ABSTRACT:
A high Q MEMS capacitor that can be continuously tuned with a large tuning ratio or reversibly trimmed using an electrostatic force. The tunable capacitor has a master/slave structure in which a control voltage is applied to the master (control) capacitor to set the capacitance of the slave (signal) capacitor to which an RF signal is applied via a suspended mechanical coupler. The master-slave structure reduces tuning error by reducing the signal capacitor's surface area and increasing its spring constant, and may eliminate the need for discrete blocking inductors by electrically isolating the control and signal capacitors. The trimmable capacitor provides an electrostatic actuator that selectively engages a stopper with teeth on a tunable capacitor structure to fix the trimmed capacitance.

REFERENCES:
patent: 5491604 (1996-02-01), Nguyen et al.
patent: 5578976 (1996-11-01), Yao et al.
patent: 5640133 (1997-06-01), MacDonald et al.
Young, Darrin J. et al., A Micromachined Variable Capacitor for Monolithic Low-Noise VCOS, Solid-State Sensor and Actuator Workshop, Hilton Head, South Carolina, Jun. 2-6, 1996.

Affiliated with

Also associated with

Rating

Tunable-trimmable micro electro mechanical system (MEMS) capacit does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Tunable-trimmable micro electro mechanical system (MEMS) capacit, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Tunable-trimmable micro electro mechanical system (MEMS) capacit will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-707938