Tunable microresonator on an insulating beam deformable by...

Details Tunable microresonator on an insulating beam deformable by... Tunable microresonator on an insulating beam deformable by...

2006-05-02

2006-05-02

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C367S163000, C310S343000, C310S306000, C310S307000

Reexamination Certificate

active

07038355

ABSTRACT:
A device comprising a resonator formed of a piezoelectric layer sandwiched between two metal electrodes, the resonator being laid on a suspended beam, the device comprising means for deforming said beam by the difference in thermal expansion coefficients.

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