Abrasive tool making process – material – or composition – With inorganic material
Reexamination Certificate
2006-12-26
2006-12-26
Marcheschi, Michael A. (Department: 1755)
Abrasive tool making process, material, or composition
With inorganic material
C051S309000, C106S003000, C106S011000, C438S692000, C438S693000, C252S079100, C252S079400
Reexamination Certificate
active
07153335
ABSTRACT:
A composition and associated method for chemical mechanical planarization (or other polishing) are described which afford high tantalum to copper selectivity in copper CMP and which are tunable (in relation to polishing performance). The composition comprises an abrasive and an N-acyl-N-hydrocarbonoxyalkyl aspartic acid compound and/or a tolyltriazole derivative.
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Compton Timothy Frederick
Hu Bin
Richards Robin Edward
Siddiqui Junaid Ahmed
Chase Geoffrey L.
Dupont Air Products Nanomaterials LLC
Marcheschi Michael A.
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