Triple-junction filterless CMOS color imager cell

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S290000, C438S048000

Reexamination Certificate

active

07470946

ABSTRACT:
A triple-junction complimentary metal-oxide-semiconductor (CMOS) filterless color imager cell is provided. The imager cell is made from a bulk silicon (Si) substrate. A photodiode set including a first, second, and third photodiode are formed as a triple-junction structure in the Si substrate. A transistor set is connected to the photodiode set, and detects an independent output signal for each photodiode. Typically, the transistor set is formed in the top surface of the substrate. For example, the Si substrate may be a p-doped Si substrate, and the photodiode triple-junction structure includes the first photodiode forming a pn junction from an n+-doped region at the Si substrate top surface, to an underlying p-doped region. The second photodiode forms a pn junction from the p-doped region to an underlying n-well, and the third photodiode forms a pn junction from the n-well to the underlying p-doped Si substrate.

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K. M. Findlater, D. Renshaw, J. E. D. Hurwitz, R. K. Henderson, M. D. Purcell, S. G. Smith, and T. E. R. Bailey, “A CMOS Image Sensor With a Double-Junction Active Pixel”. IEEE Trans. Ed 50, #1, pp. 32-42, Jan. 2003.
K.M.Findlatera, P.B.Denyerb, R.K.Hendersonb, J.E.D.Hurwitzb, J.M.Raynorb, D.Renshawa, “Buried double junction pixel using green and magenta filters”, pp. 60-64, 1999.

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