Measuring and testing – Speed – velocity – or acceleration – Response to multiple sensing means or motion conditions
Reexamination Certificate
2006-11-16
2008-10-07
Kwok, Helen C. (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Response to multiple sensing means or motion conditions
C073S514380
Reexamination Certificate
active
07430909
ABSTRACT:
In an embodiment of the present invention there is provided a micro-electromechanical (MEMS) accelerometer, including a substrate, a first sensor and a second sensor. The first sensor is configured to measure an acceleration along a first axis parallel to a plane of the substrate. The second sensor is configured to measure an acceleration along an axis perpendicular to the plane of the substrate. The second sensor comprises a first beam, a second beam and a single support structure. The single support structure supports the first and second beams relative to the substrate, wherein the first and second beams circumscribe the first sensor.
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International Search Report and Written Opinion for PCT/US 06/44517, 7 pages, dated Jul. 30, 2007.
Adams Scott G.
Epstein Keith
Miller Scott A.
Shen-Epstein June
Kionix, Inc.
Kwok Helen C.
Sterne Kessler Goldstein & Fox P.L.L.C.
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