Trench EPROM

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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Details

257318, 365149, 36518501, H01L 2980

Patent

active

059329084

ABSTRACT:
A two-device nonvolatile memory cell is described. The cell comprises a planar FET and a vertical FET in series. The vertical FET has a floating gate that is predominantly capacitively coupled to a buried n well that serves as the control electrode. The structure is very similar to a trench DRAM cell, and the nonvolatile memory cell can be integrated onto a DRAM chip.

REFERENCES:
patent: 3660819 (1972-05-01), Frohman-Bentchkowsky
patent: 3843954 (1974-10-01), Hansen et al.
patent: 4845538 (1989-07-01), Hazani
patent: 5016068 (1991-05-01), Mori
patent: 5196722 (1993-03-01), Bergendahl et al.
patent: 5598367 (1997-01-01), Noble

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