Trench-based capacitor for integrated circuits

Details Trench-based capacitor for integrated circuits Trench-based capacitor for integrated circuits

2007-01-23

2007-01-23

Jackson, Jerome (Department: 2815)

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Passive components in ics

C257S303000, C257S534000, C257S535000

Reexamination Certificate

active

10988812

ABSTRACT:
In one embodiment, an electrically conductive trench in an integrated circuit allows for the formation of capacitors between the trench and other portions of the integrated circuit. For example, a capacitor may be formed between the trench and an electrically conductive line. Among other advantages, the capacitor provides a relatively large capacitance while occupying a relatively small area.

REFERENCES:
patent: 6559493 (2003-05-01), Lee et al.
patent: 2002/0185707 (2002-12-01), Ishii
patent: 2003/0001188 (2003-01-01), Nakagawa
patent: 2004/0036143 (2004-02-01), Hu et al.
patent: 2004/0232520 (2004-11-01), Tsau

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