Treatment of a dielectric layer using supercritical CO 2

Details Treatment of a dielectric layer using supercritical CO 2 Treatment of a dielectric layer using supercritical CO 2

2008-06-17

2008-06-17

Duda, Kathleen (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

C430S329000, C134S001300

Reexamination Certificate

active

07387868

ABSTRACT:
A method of passivating silicon-oxide based low-k materials using a supercritical carbon dioxide passivating solution comprising a silylating agent is disclosed. The silylating agent is preferably an organosilicon compound comprising organo-groups with five carbon atoms such as hexamethyldisilazane (HMDS), chlorotrimethylsilane (TMCS), trichloromethylsilane (TCMS) and combinations thereof. In accordance with further embodiments of the invention, a post ash substrate comprising a dielectric material is simultaneously cleaned and passivated using a supercritical carbon dioxide cleaning solution.

REFERENCES:
patent: 2439689 (1948-04-01), Hyde et al.
patent: 2617719 (1952-11-01), Stewart
patent: 2625886 (1953-01-01), Browne
patent: 2873597 (1959-02-01), Fahringer
patent: 2993449 (1961-07-01), Harland
patent: 3135211 (1964-06-01), Pezzillo
patent: 3521765 (1970-07-01), Kauffman et al.
patent: 3623627 (1971-11-01), Bolton
patent: 3642020 (1972-02-01), Payne
patent: 3646948 (1972-03-01), Athey
patent: 3681171 (1972-08-01), Toku Hojo et al.
patent: 3744660 (1973-07-01), Gaines et al.
patent: 3890176 (1975-06-01), Bolon
patent: 3900551 (1975-08-01), Bardoncelli et al.
patent: 3968885 (1976-07-01), Hassan et al.
patent: 4029517 (1977-06-01), Rand
patent: 4091643 (1978-05-01), Zucchini
patent: 4145161 (1979-03-01), Skinner
patent: 4219333 (1980-08-01), Harris
patent: 4245154 (1981-01-01), Uehara et al.
patent: 4316750 (1982-02-01), Gengler
patent: 4341592 (1982-07-01), Shortes et al.
patent: 4349415 (1982-09-01), DeFilippi et al.
patent: 4355937 (1982-10-01), Mack et al.
patent: 4367140 (1983-01-01), Wilson
patent: 4391511 (1983-07-01), Akiyama et al.
patent: 4406596 (1983-09-01), Budde
patent: 4422651 (1983-12-01), Platts
patent: 4426358 (1984-01-01), Johansson
patent: 4474199 (1984-10-01), Blaudszun
patent: 4475993 (1984-10-01), Blander et al.
patent: 4522788 (1985-06-01), Sitek et al.
patent: 4549467 (1985-10-01), Wilden et al.
patent: 4574184 (1986-03-01), Wolf et al.
patent: 4592306 (1986-06-01), Gallego
patent: 4601181 (1986-07-01), Privat
patent: 4618769 (1986-10-01), Johnson et al.
patent: 4626509 (1986-12-01), Lyman
patent: 4670126 (1987-06-01), Messer et al.
patent: 4682937 (1987-07-01), Credle, Jr.
patent: 4693777 (1987-09-01), Hazano et al.
patent: 4730630 (1988-03-01), Ranft
patent: 4749440 (1988-06-01), Blackwood et al.
patent: 4778356 (1988-10-01), Hicks
patent: 4788043 (1988-11-01), Kagiyama et al.
patent: 4789077 (1988-12-01), Noe
patent: 4823976 (1989-04-01), White, III et al.
patent: 4825808 (1989-05-01), Takahashi et al.
patent: 4827867 (1989-05-01), Takei et al.
patent: 4838476 (1989-06-01), Rahn
patent: 4865061 (1989-09-01), Fowler et al.
patent: 4877530 (1989-10-01), Moses
patent: 4879004 (1989-11-01), Oesch et al.
patent: 4879431 (1989-11-01), Bertoncini
patent: 4917556 (1990-04-01), Stark et al.
patent: 4923828 (1990-05-01), Gluck et al.
patent: 4924892 (1990-05-01), Kiba et al.
patent: 4925790 (1990-05-01), Blanch et al.
patent: 4933404 (1990-06-01), Beckman et al.
patent: 4944837 (1990-07-01), Nishikawa et al.
patent: 4951601 (1990-08-01), Maydan et al.
patent: 4960140 (1990-10-01), Ishijima et al.
patent: 4983223 (1991-01-01), Gessner
patent: 5009738 (1991-04-01), Gruenwald et al.
patent: 5011542 (1991-04-01), Weil
patent: 5013366 (1991-05-01), Jackson et al.
patent: 5044871 (1991-09-01), Davis et al.
patent: 5062770 (1991-11-01), Story et al.
patent: 5068040 (1991-11-01), Jackson
patent: 5071485 (1991-12-01), Matthews et al.
patent: 5091207 (1992-02-01), Tanaka
patent: 5105556 (1992-04-01), Kurokawa et al.
patent: 5143103 (1992-09-01), Basso et al.
patent: 5158704 (1992-10-01), Fulton et al.
patent: 5167716 (1992-12-01), Boitnott et al.
patent: 5169296 (1992-12-01), Wilden
patent: 5169408 (1992-12-01), Biggerstaff et al.
patent: 5174917 (1992-12-01), Monzyk
patent: 5185058 (1993-02-01), Cathey, Jr.
patent: 5185296 (1993-02-01), Morita et al.
patent: 5186594 (1993-02-01), Toshima
patent: 5186718 (1993-02-01), Tepman et al.
patent: 5188515 (1993-02-01), Horn
patent: 5190373 (1993-03-01), Dickson et al.
patent: 5191993 (1993-03-01), Wanger et al.
patent: 5193560 (1993-03-01), Tanaka et al.
patent: 5195878 (1993-03-01), Sahiavo et al.
patent: 5196134 (1993-03-01), Jackson
patent: 5197800 (1993-03-01), Saidman et al.
patent: 5201960 (1993-04-01), Starov
patent: 5213485 (1993-05-01), Wilden
patent: 5213619 (1993-05-01), Jackson et al.
patent: 5215592 (1993-06-01), Jackson
patent: 5217043 (1993-06-01), Novakovi
patent: 5221019 (1993-06-01), Pechacek
patent: 5222876 (1993-06-01), Budde
patent: 5224504 (1993-07-01), Thompson et al.
patent: 5225173 (1993-07-01), Wai
patent: 5236602 (1993-08-01), Jackson
patent: 5236669 (1993-08-01), Simmons et al.
patent: 5237824 (1993-08-01), Pawliszyn
patent: 5238671 (1993-08-01), Matson et al.
patent: 5240390 (1993-08-01), Kvinge et al.
patent: 5242641 (1993-09-01), Horner et al.
patent: 5243821 (1993-09-01), Schuck et al.
patent: 5246500 (1993-09-01), Samata et al.
patent: 5250078 (1993-10-01), Saus et al.
patent: 5251776 (1993-10-01), Morgan, Jr. et al.
patent: 5252041 (1993-10-01), Schumack
patent: 5259731 (1993-11-01), Dhindsa et al.
patent: 5261965 (1993-11-01), Moslehi
patent: 5266205 (1993-11-01), Fulton et al.
patent: 5267455 (1993-12-01), Dewees et al.
patent: 5269815 (1993-12-01), Schlenker et al.
patent: 5269850 (1993-12-01), Jackson
patent: 5274129 (1993-12-01), Natale et al.
patent: 5280693 (1994-01-01), Heudecker
patent: 5285352 (1994-02-01), Pastore et al.
patent: 5288333 (1994-02-01), Tanaka et al.
patent: 5290361 (1994-03-01), Hayashida et al.
patent: 5294261 (1994-03-01), McDermott et al.
patent: 5298032 (1994-03-01), Schlenker et al.
patent: 5304515 (1994-04-01), Morita et al.
patent: 5306350 (1994-04-01), Hoy et al.
patent: 5312882 (1994-05-01), DeSimone et al.
patent: 5313965 (1994-05-01), Palen
patent: 5314574 (1994-05-01), Takahashi
patent: 5316591 (1994-05-01), Chao et al.
patent: 5320742 (1994-06-01), Fletcher et al.
patent: 5328722 (1994-07-01), Ghanayem et al.
patent: 5331986 (1994-07-01), Lim et al.
patent: 5334332 (1994-08-01), Lee
patent: 5334493 (1994-08-01), Fujita et al.
patent: 5337446 (1994-08-01), Smith et al.
patent: 5339539 (1994-08-01), Shiraishi et al.
patent: 5339844 (1994-08-01), Stanford, Jr. et al.
patent: 5352327 (1994-10-01), Witowski
patent: 5355901 (1994-10-01), Mielnik et al.
patent: 5356538 (1994-10-01), Wai et al.
patent: 5364497 (1994-11-01), Chau et al.
patent: 5368171 (1994-11-01), Jackson
patent: 5370740 (1994-12-01), Chao et al.
patent: 5370741 (1994-12-01), Bergman
patent: 5370742 (1994-12-01), Mitchell et al.
patent: 5374829 (1994-12-01), Sakamoto et al.
patent: 5377705 (1995-01-01), Smith, Jr. et al.
patent: 5378311 (1995-01-01), Nagayama et al.
patent: 5397220 (1995-03-01), Akihisa et al.
patent: 5401322 (1995-03-01), Marshall
patent: 5403621 (1995-04-01), Jackson et al.
patent: 5403665 (1995-04-01), Alley et al.
patent: 5404894 (1995-04-01), Shiraiwa
patent: 5412958 (1995-05-01), Iliff et al.
patent: 5417768 (1995-05-01), Smith, Jr. et al.
patent: 5433334 (1995-07-01), Reneau
patent: 5434107 (1995-07-01), Paranjpe
patent: 5447294 (1995-09-01), Sakata et al.
patent: 5456759 (1995-10-01), Stanford, Jr. et al.
patent: 5470393 (1995-11-01), Fukazawa
patent: 5474410 (1995-12-01), Ozawa et al.
patent: 5474812 (1995-12-01), Truckenmuller et al.
patent: 5482564 (1996-01-01), Douglas et al.
patent: 5486212 (1996-01-01), Mitchell et al.
patent: 5494526 (1996-02-01), Paranjpe
patent: 5500081 (1996-03-01), Bergman
patent: 5501761 (1996-03-01), Evans et al.
patent: 5503176 (1996-04-01), Dunmire et al.
patent: 5505219 (1996-04-01), Lansberry et al.
patent: 5509431 (1996-04-01), Smith, Jr. et al.
patent: 5514220 (1996-05-01), Wetmore et al.
patent: 5522938 (1996-06-01), O'Brien
patent: 5526834 (1996-06-01), Mielnik et al.
patent: 5533538 (1996-07-01), Marshall
patent: 5540554 (1996-07-01), Masuzawa
patent: 5547774 (1996-08-01), Gimzewski et al.
patent: 5550211 (1996-08-01), DeCrosta et al.
patent: 5571330 (1996-11-01), Kyogoku
patent: 5580846 (1996-12-01), Hayashida et al.
patent: 55890

Affiliated with

Also associated with

Rating

Treatment of a dielectric layer using supercritical CO 2 does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Treatment of a dielectric layer using supercritical CO 2, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Treatment of a dielectric layer using supercritical CO 2 will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2801430