Treatment apparatus

Details Treatment apparatus Treatment apparatus

1995-08-31

1998-05-19

Walberg, Teresa J.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219402, 219536, 219541, 373125, H01L 3532, H05B 304

Patent

active

057538913

ABSTRACT:
A treatment apparatus comprises a heater including an insulator carrying a to-be-treated object thereon and a resistance heating element therein for heating the to-be-treated object, an electrical supply mechanism including feeders extending into a treatment chamber from outside and terminals connecting the feeders and the resistance heating element, and a metallic pipe surrounding the terminals and those portions of the feeders which extend in the treatment chamber. A treatment apparatus for discharging an exhaust gas from the treatment chamber through an exhaust pipe by means of a suction unit comprises a first heater in the inner wall of the treatment chamber for heating the gas in the treatment chamber, and a second heater for independently heating the exhaust gas in the exhaust pipe at various portions of the exhaust pipe.

REFERENCES:
patent: 4171346 (1979-10-01), King et al.
patent: 5109473 (1992-04-01), Rezabek et al.
patent: 5306895 (1994-04-01), Ushikoshi et al.
patent: 5462603 (1995-10-01), Murakami
patent: 5536478 (1996-07-01), Lipp et al.

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