Tray for visual inspection of semiconductor wafer

Details Tray for visual inspection of semiconductor wafer Tray for visual inspection of semiconductor wafer

1997-11-10

1999-06-15

Hughes, S. Thomas

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

2063081, 206769, 206564, 206701, B65D 8500

Patent

active

059113260

ABSTRACT:
The object of the present invention is to provide a tray for inspecting the surfaces of semiconductor wafers, which can enhance the success at visually identifying flaws on the edge of the semiconductor wafer and can reduce the irregular reflection occurring in the tray. According to this invention, the tray for inspecting the surfaces of semiconductor wafers of this invention includes a panel-shaped tray body 1; and a support frame 3 installed on the surface of the tray body vertically, capable of loading a semiconductor wafer 5 in a manner elevated from and parallel with the tray body 1.

REFERENCES:
patent: 5487398 (1996-01-01), Ohmi et al.

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