Transport module with latching door

Special receptacle or package – Holder for a removable electrical component – For a semiconductor wafer

Reexamination Certificate

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Details

C070S063000, C206S454000, C414S217100

Reexamination Certificate

active

06945405

ABSTRACT:
A wafer container has an open front defined by a frame for receiving a door. The frame has slots on opposite sides. The door utilizes two latching linkages that extend, lift, lower and retract two latching portions from the edge portion of each opposite side of the door and into and out of latch receptacles on the frame. Each latching mechanism utilizes a sliding plate with a handle connected thereto and exposed on the front of the door. The sliding plate has a pair of lifting linkages cooperating with a pair of latching linkages. Moving the handles outwardly extends the latching portions into the latching receptacles, then pulls the door inwardly to seal the door to the container portion. The sliding plate includes a rack portion engaged with a pinion accessible from the front of the door by a latch key whereby the mechanism can be operated robotically.

REFERENCES:
patent: 5173273 (1992-12-01), Brewer
patent: 5711427 (1998-01-01), Nyseth
patent: 5915562 (1999-06-01), Nyseth et al.
patent: 5957292 (1999-09-01), Mikkelsen et al.
patent: 5988392 (1999-11-01), Hosoi
patent: 6098809 (2000-08-01), Okada et al.

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