Transport module

Details Transport module Transport module

2008-05-13

2008-05-13

Pickett, J. Gregory (Department: 3728)

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

C414S217100

Reexamination Certificate

active

10848096

ABSTRACT:
A front-opening wafer transport module has a container portion with transparent shell and a central support structure which includes a machine interface exposed at the bottom of the module and integral wafer support columns extending upwardly in the container portion for supporting wafers. Additionally, the side walls of the shell have recessed portions with engagement members that cooperate with engagement members on removable handles. The handles utilize detents to lock into place in the recesses on the side walls of the carrier. Attachment of the handles to the side walls is accomplished without breaks between the interior and exterior of the module and without separate fastners.

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