Transport module

Details Transport module Transport module

2008-05-13

2008-05-13

Pickett, J. Gregory (Department: 3728)

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

C414S217100

Reexamination Certificate

active

07370764

ABSTRACT:
A front-opening wafer transport module has a container portion with transparent shell and a central support structure which includes a machine interface exposed at the bottom of the module and integral wafer support columns extending upwardly in the container portion for supporting wafers. Additionally, the side walls of the shell have recessed portions with engagement members that cooperate with engagement members on removable handles. The handles utilize detents to lock into place in the recesses on the side walls of the carrier. Attachment of the handles to the side walls is accomplished without breaks between the interior and exterior of the module and without separate fastners.

REFERENCES:
patent: 324671 (1885-08-01), Drake
patent: 2936189 (1960-05-01), Pearson
patent: 4532970 (1985-08-01), Tullis et al.
patent: 4555024 (1985-11-01), Voss et al.
patent: 4676709 (1987-06-01), Bonora et al.
patent: 4739882 (1988-04-01), Parikh et al.
patent: 4815912 (1989-03-01), Maney et al.
patent: 4995430 (1991-02-01), Bonora et al.
patent: 5024329 (1991-06-01), Grohrock
patent: 5042676 (1991-08-01), Gohlke
patent: 5253755 (1993-10-01), Maenke
patent: 5445271 (1995-08-01), Kakizaki et al.
patent: 5452795 (1995-09-01), Gallagher et al.
patent: 5469963 (1995-11-01), Bonora et al.
patent: 5482161 (1996-01-01), Williams et al.
patent: 5555981 (1996-09-01), Gregerson
patent: 5570987 (1996-11-01), McKenna
patent: D378873 (1997-04-01), Gregerson et al.
patent: 5711427 (1998-01-01), Nyseth
patent: 5755332 (1998-05-01), Holliday et al.
patent: 5788082 (1998-08-01), Nyseth
patent: 6000732 (1999-12-01), Scheler et al.
patent: 6006919 (1999-12-01), Betsuyaku
patent: 6010008 (2000-01-01), Nyseth et al.
patent: 6082540 (2000-07-01), Krampotich et al.
patent: 6267245 (2001-07-01), Bores et al.
patent: 6273261 (2001-08-01), Hosoi
patent: 6382419 (2002-05-01), Fujimori et al.
patent: 6398032 (2002-06-01), Fosnight et al.
patent: 6432849 (2002-08-01), Endo et al.
patent: 2002/0020650 (2002-02-01), Fujimori et al.
patent: 2003/0047476 (2003-03-01), Wu et al.
patent: 6-56185 (1994-03-01), None
patent: WO 9713710 (1997-04-01), None

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