Stock material or miscellaneous articles – All metal or with adjacent metals – Composite; i.e. – plural – adjacent – spatially distinct metal...
Patent
1987-02-02
1988-09-06
Andrews, Melvyn J.
Stock material or miscellaneous articles
All metal or with adjacent metals
Composite; i.e., plural, adjacent, spatially distinct metal...
428632, 428641, 428650, 428658, 428673, 428 34, 20419223, 20419226, 20419229, C23C 1410, C23C 1418
Patent
active
047692910
ABSTRACT:
A method for depositing a protective coating by cathode sputtering of an alloy of aluminum and silicon in a reactive gas is disclosed. The sputtering target contains sufficient silicon to produce an amorphous coating; 6 to 18 percent silicon is preferred. Targets of approximately 88% aluminum and 12% silicon are especially preferred. Oxygen, nitrogen, compounds of oxygen and compounds of nitrogen are preferred reactive gases. A range of combinations of oxygen and nitrogen are particularly preferred. The method provides durable transparent coatings which may be used as an overcoating for a metal or dielectric coating to provide increased resistance to abrasion and corrosion. In particular, the protected coating may be a metal, dielectric or dielectric-metal-dielectric coating as used in double-glazed window units for buildings or vehicles.
REFERENCES:
patent: 4125446 (1978-11-01), Hartsouch et al.
patent: 4610771 (1986-09-01), Gillery
J. C. Williams et al., "Preparation of Thin Mullite Films", J. Am. Ceram. Soc., vol. 46, pp. 161-167 (1963).
R. S. Nowicki, "Influence of Residual Gases on the Prop. of dc Magnetron Sputtered Al-Si", J. Vac. Sci. Technol., 17(1), pp. 384-387 (1980).
Belkind Abraham I.
Bjornard Erik
Hofmann James J.
Jacobson Donald V.
Nadel Steven J.
Andrews Melvyn J.
Cassett Larry R.
Draegert David A.
The BOC Group Inc.
Wyszomierski George
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