Transmission-type scanning charged-particle beam microscope

Details Transmission-type scanning charged-particle beam microscope Transmission-type scanning charged-particle beam microscope

1979-01-29

1980-07-08

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250398, G01M 2300

Patent

active

042119243

ABSTRACT:
An improved transmission-type, scanning charged-particle beam microscope including a television camera tube and a television display tube for generating and displaying a diffraction image of a specimen to be examined. The improvement of the invention comprises the provision of a transparent fluorescent screen disposed in the ray cone of the beam behind the specimen along the beam path in the microscope, light-optical means adapted for imaging the fluorescent screen on a target of the television camera tube, and detector means for integrally detecting radiation emanating from the fluorescent screen.

REFERENCES:
patent: 4099055 (1978-07-01), Todokoro

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